For monitoring processes or characterising materials and products, the often isolated characteristic gas assembly can be used. In general, sensor arrays are used in measuring a gas assembly; these have a complex structure and therefore high manufacturing costs. Researchers at the Karlsruhe Institute for Technology (KIT) have developed a cheaper micro-array by segmenting a single metal oxide film which carries a gas-permeable membrane layer only a few nanometres thick, and differentiating the sensor segments using a temperature and membrane gradient technique. This micro-array supplies characteristic conductivity templates both for individual gases and for complex gas compounds, thereby enabling high-performance continuous gas characterisation to take place. The gas analysis microsystem enables any type of complex gas compound to be quickly recorded or followed up, and individual gases to be identified. In addition to qualitative analysis, quantification is also possible. There are a multitude of applications for the gas analysis microsystem, including process monitoring with associated quality improvement, environmental technology and medical and domestic technology.